Axcelis Technologies, a leader in supplying innovative, high-productivity solutions for the semiconductor industry, has announced its receipt of a multiple system follow-on order for its Integra RS plasma dry strip system from one of the leading semiconductor manufacturers in the world. The systems, which began shipping this month, will be utilized in the production of 3x nm and below NAND Flash devices at leading-edge fabs in Asia and the United States.
Axcelis is pleased to expand its installed base in working with this industry leader and supporting its evolving manufacturing needs. The Integra dry strip system has shown superior manufacturing productivity for Axcelis’ memory customers, combined with process technologies that are extendable to the most advanced device nodes. Customers value the system’s ability to efficiently handle standard dry strip processes, together with critical cleaning steps over sensitive exposed metals on a single modular wafer handling platform. This distinctive combination of productivity and process performance makes the Integra an ideal choice for the high volume manufacturing of leading-edge memory.
A recognized leader in plasma cleaning and dry strip technology, Axcelis supplies systems that are known around the world for their innovative process solutions, leading reliability and low cost of ownership. The company’s portfolio of dry strip cleaning products includes the Integra RS and ES systems, as well as the Rapidstrip 320 and 210 systems. Together, these products deliver plasma cleaning technology that is highly differentiated and meets the full range of customer needs – from the highest productivity, non-oxidizing solutions for 28nm and below to single chamber, small substrate size applications in the MEMS, LED and packaging markets.
Axcelis Technologies is headquartered in Beverly, Mass. The company provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is focused on developing enabling process applications through designing, manufacturing, and completing life cycle support of ion implantation and cleaning systems.
For more information, visit the company’s Web site at www.axcelis.com
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